To explore integrated solar energy harvesting as a power source for low power systems, an array of energy scavenging photodiodes based on a passive-pixel architecture for CMOS imagers has been fabricated together with storage capacitors implemented using on-chip interconnect in a 0.35- m bulk process. Integrated vertical plate capacitors enable dense energy storage without limiting optical efficiency. Tests were conducted with both a white light source and a green laser. Measurements Indicate that 225 W/mm output power may be generated by white light with an intensity of 20 Klux.
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